Teledyne 452 - Manuals - manualsarea.com

Page 2 - SAFETY MESSAGES

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E i SAFETY MESSAGES NOTE The M452 contains no user serviceable parts. CAUTION There is risk of dangerous UV exposure when the cover is removed from the sensor. Take necessary precautions to avoid exposure. CAUTION High voltages exist ins...

Page 4 - iii; TABLE OF CONTENTS

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E iii TABLE OF CONTENTS SAFETY MESSAGES ............................................................................ I TABLE OF CONTENTS .................................................................... III LIST OF FIGURES ..............

Page 5 - iv

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E iv 5 SENSOR AND SYSTEM TROUBLESHOOTING ...................... 5-1 5.1 S TATUS LED’ S ............................................................................. 5-1 5.2 S TATUS O UTPUTS ..................................................

Page 8 - vii; WARRANTY POLICY; COVERAGE

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E vii WARRANTY POLICY ADVANCED POLLUTION INSTRUMENTATION DIVISION 02024c Prior to shipment, Teledyne API equipment is thoroughly inspected and tested. Should equipment failure occur, Teledyne API assures its customers that prompt service...

Page 10 - Product Descriptions; M452 High Purity Process Ozone Sensor

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 1-1 1 Product Descriptions 1.1 M452 Process Ozone Sensor The Teledyne API M452 is a microprocessor-based sensor for measuring the concentration of gaseous ozone in processes such as semiconductor wafer fabrication, water treatment, and...

Page 11 - INTENTIONALLY BLANK

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 1-2 INTENTIONALLY BLANK

Page 12 - Specifications; Mechanical Specifications; Figure 2-1: M452A High Purity Ozone Sensor

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2-1 2 Specifications Note: All specifications contained herein are subject to change without notice. Please contact Teledyne API to obtain the current specifications. 2.1 Mechanical Specifications 10 Digital out #3 12 Digital out commo...

Page 13 - Calibration Reference

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2-2 2.2 Performance Specifications Accuracy: Repeatability: ± 1% of Full Scale. 1% of Full Scale Response Time: 2 sec. To 95% Zero Drift: 1% Full Scale/month (non –cumulative) 2.3 Operating Limits Measurement Range: 5, 10, 15, 20% w/w ...

Page 16 - Theory of Operation; psi

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 3-1 3 Theory of Operation The detection of ozone molecules is based on absorption of 254 nm UV light due to an internal electronic resonance of the O 3 molecule. The Model 452 uses a mercury lamp constructed so that a large majority of...

Page 18 - Installation; Mechanical Installation

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4-1 4 Installation 4.1 Unpacking Upon receiving the M452 please verify that no apparent shipping damage has occurred. If damage has occurred please advise shipper first, then Teledyne API. 4.2 Mechanical Installation Mount the M452 to ...

Page 23 - before

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4-6 4.4 Gas Connections Gas connections to the M452 are made using ¼” compression tube fittings (M452) or ¼” VCR ™ face seal fittings (M452A.) The ¼” compression fittings can be used with ¼” O.D. Stainless Steel or Teflon ™ tubing. The...

Page 29 - Status Output Summary Table

Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 5-4 5.6 Cell Dirty The normal state for the Cell Dirty output is OFF. If this output turns on, then the ratio of the measure detector to the reference detector (at zero) is < 0.5. This value is calculated when the zero calibration i...