Page 2 - ARNING; cause bodily injury or death.; AUTION; damage to equipment or permanent loss of data.
Safety Information Read this manual before installing, operating, or servicing this equipment. Do not installsubstitute parts, or perform any unauthorized modification of the product. Return theproduct to Sigma Instruments for service and repair to ensure that safety features aremaintained. Safety S...
Page 6 - : The SQM-160 is shipped with a 1⁄2 A Fuse for use; : Verify that the Voltage Selector Switch located next
Chapter 1 Quick Start 1-1 1.0 Introduction Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor.The SQM-160 is an easy-to-use instrument for measuring many types of thin filmcoatings. This chapter will help to get you up and running quickly. Please review theentire manua...
Page 7 - Front Panel Controls; Display 1; S i g m a
Chapter 1 Quick Start 1-2 1.2 Front Panel Front Panel Controls Display 1 Displays rate and thickness in normal operation.Displays setup parameter name in program mode. Display 2 Displays deposition time in normal operation.Displays setup parameter value in program mode. ControlSection Zero thickness...
Page 8 - Rear Panel Connections
Chapter 1 Quick Start 1-3 1.3 Rear Panel Rear Panel Connections Sensor 1 & 2 Connection to quartz crystal sensor remote oscillator. SeeSection 1.4 for detailed hookup. RS-232 Connection to computer serial port for programming and dataacquisition. Relay I/O Connects 4 relays and 4 digital inputs ...
Page 9 - System Components; Sensor
Chapter 1 Quick Start 1-4 1.4 System Connections The diagram and table below identifies typical vacuum system components and theirfunction. System Components Sensor Holds the quartz crystal used to measure rate and thickness.Crystals must be replaced occasionally. In-Vac Cable A coax cable, typicall...
Page 10 - Select a Film
Chapter 1 Quick Start 1-5 1.5 Film Setup This section will help you setup the SQM-160 to measure a film. Refer to Chapter 2 fordetailed film programming instructions. Note: User actions with front panel controls are indicated by a Box . Results shown ondisplays, are indicated by a Dashed Box . Enter...
Page 11 - Display 1 should be displaying Rate on the left and Thickness
Chapter 1 Quick Start 1-6 1.6 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Follow theprocedure below to begin deposition. Verify SensorOperation Verify that the Crystal Status LED for the measuring sensor islit, and not flashing. DisplayRate/Thick...
Page 12 - all
Chapter 2 Operation 2-1 2.0 Introduction This section details the operation of the SQM-160 menus and front panel controls. It isarranged by common user tasks. Note: User actions with front panel controls are indicated by a Box . Results shown ondisplays, are indicated by a Dashed Box . 2.1 Menu Sele...
Page 13 - Press P rogram to enter program mode.
Chapter 2 Operation 2-2 2.2 Film Parameters Setup The Film Parameters Menu programs the SQM-160 for the materials that will bedeposited as thin films. Nine films can be stored, but only one film is active at any time.To program film parameters: 1. Press P rogram to enter program mode. 2. Use the Con...
Page 14 - KÅ
Chapter 2 Operation 2-3 The diagram and table below detail the parameters available in the Film ParametersMenu: Display Description Range Default Units DENSITY Density of the material beingdeposited. 0.5 – 99.99 1.00 gm/cc TOOLING Overall tooling Factor for this film.See the Sensor Tooling section o...
Page 19 - To set sensor minimum and maximum frequencies:
Chapter 2 Operation 2-8 2.5 Sensor Min/Max Frequency The Sensor Min/Max frequencies establish the operating range for the sensing quartzcrystals. Both values are used to determine the % life that is displayed in Xtal Lifemode. When the sensor frequency drops below the minimum, the SQM-160 indicates ...
Page 20 - Substrate
Chapter 2 Operation 2-9 2.6 Sensor Tooling Sensor Tooling adjusts for the difference in deposition rate between the sensor and thesubstrate being coated. It is an empirically determined value that matches the sensorreadings to your vacuum system. Substrate Substrate Tooling Over 100% Tooling Under 1...
Page 21 - Crystal Life Display; Press the X tal Life switch in the front panel Control section.
Chapter 2 Operation 2-10 2.7 Rate/Thickness or Frequency Display The SQM-160 determines deposition rate and thickness by measuring the frequencyshift of a crystal oscillator over time. In some applications, the actual crystal frequencyis desired. Displaying crystal frequency can also be useful in tr...
Page 23 - : Hazardous voltages are present inside the SQM-160 when it is
Chapter 3 Options 3-1 3.0 Introduction The SQM-160 has two slots to accommodate option cards. The Option A slot holds aFour Sensor Card, which expands the SQM-160 inputs to a total of six quartz crystalsensors. The Option B Analog Output Card provides Rate and Thickness outputs forconnection to stri...
Page 25 - Insert installation Disk 1 into your computer’s A Drive.
Chapter 4 MonComm Software 4-1 4.0 Introduction Included with the SQM-160 is a Windows 95/98 program, MonComm. MonComm isused to setup instrument parameters, graph, and save instrument readings. 4.1 Installation 1. Insert installation Disk 1 into your computer’s A Drive. 2. In Windows 95/98 select S...
Page 26 - To add a new film to the Films List:; New Film; To delete a film from the Films List:; Films
Chapter 4 MonComm Software 4-2 4.3 Add and Delete Films To add a new film to the Films List: 1. Click the New Film button. 2. A film named NewFilm# will be added to the end of the films list. 3. Click on this film to highlight it. 4. Change the name of the film - up to eight characters are allowed. ...
Page 27 - To add or replace a film in the Download List:
Chapter 4 MonComm Software 4-3 4.4 Download Films To add or replace a film in the Download List: 1. Highlight the desired film by clicking onit in the Films list box. 2. Highlight the desired position for the filmin the Download List box. 3. Click on the Add Film button. If there is already a film i...
Page 28 - The SQM-160 graphs are accessed by clicking the
Chapter 4 MonComm Software 4-4 4.5 Graph Data The SQM-160 graphs are accessed by clicking the Graph button. Two graphs of data from the SQM-160 can be displayed. The first displays the averagerate of all active channels versus time. The second graph displays each individualchannel’s rate versus time...
Page 29 - To Adjust the Graph’s Scope:
Chapter 4 MonComm Software 4-5 To Adjust the Graph’s Scope: 1 Select the Configure menu followed by the Graph sub menu item to display the graphs configuration form. 2. Adjust the graphminimums and maximumsas desired. The X and Ydivisions determine thenumber of ticks betweengraph numerical markingsa...
Page 31 - For maintenance or repair, contact; Fuse Replacement; : Remove the power cable before replacing the fuse.; : Always replace the Line Fuse with the same size and type fuse
Chapter 5 Maintenance 5-1 5.0 Introduction W ARNING : There are no user adjustments, or serviceable parts, inside the SQM-160. For maintenance or repair, contact Sigma Instruments1318 Duff DriveFort Collins, CO 80524 USA970-416-9660 5.1 Fuse Replacement W ARNING : Remove the power cable before repla...
Page 33 - Appendix; Measurement
Appendix B. Specifications Measurement Number of Sensors Frequency Range Frequency Accuracy Frequency Resolution Rate Accuracy Rate Resolution Thickness Accuracy Thickness Resolution Measurement Filter Measurement Period 2 standard, plus 4 optional4.0MHz to 6.0Mhz.01% @ 2 rdgs/sec..1 Hz.5% typical.0...
Page 34 - Relay I/O Connector Rear View
Appendix C. I/O Connections A 15-pin female D-sub connector is included with the instrument to connect digital I/O tothe SQM-160 Relay I/O connector. The figure below shows the solder side pinassignments for the connector. Relay I/O Connector Rear View Relays are rated for 125VAC or 30VDC, 2A maximu...
Page 35 - Sigma Instruments; Manufacturer’s Address:; Rate/Thickness Monitor
Appendix D. Declaration of Conformity Manufacturer’s Name: Sigma Instruments Manufacturer’s Address: 1318 Duff DriveFort Collins, CO 80524 USA declares that the product: Product Name: Rate/Thickness Monitor Product Model: SQM-160 Product Options: All Options conforms to the following Product Specifi...
