Page 5 - Appendix
Appendix A. Material ParametersB. SpecificationsC. I/O ConnectionsD. Handheld Remote ControllerE. Declaration of Conformity
Page 6 - Note; Thin Film Process Overview
Chapter 1 Quick Start 1-1 1.0 Introduction The SQC-122c is a multi-channel quartz crystal monitor and deposition controller. Itmeasures up to six 1MHz to 6 MHz quartz crystal sensors, and controls two evaporationsources. Twenty-five processes, consisting of 250 layers and 25 materials, can bestored ...
Page 7 - SoftKeys Control Knob Remote Jack; Front Panel Controls
Chapter 1 Quick Start 1-2 1.2 Front Panel SoftKeys Control Knob Remote Jack Front Panel Controls SoftKeys Provide access to instrument operations and setup menus.The functions of the SoftKeys change to adapt to differentoperations and are displayed on the left of the screen. ControlKnob Used to adju...
Page 8 - S i g m a; Rear Panel Connections
Chapter 1 Quick Start 1-3 1.3 Rear Panel 1 0 0 - 1 2 0 / 2 0 0 - 2 4 0 V ~ 5 0 / 6 0 H z 2 5 V A S e n s o r 1 S e n s o r 2 O u t p u t 1 O u t p u t 2 I / O 1 - 8 R S - 2 3 2 S e n s o r 3 S e n s o r 4 O u t p u t 3 O u t p u t 4 i n s t r u m e n t s S i g m a M a n u f a c t u r e d B y ? I / O...
Page 9 - A coaxial cable that connects the sensor to the feedthrough.
Chapter 1 Quick Start 1-4 1.4 System Connections S e n s o r F e e d t h r o u g h I n - V a c C a b l e 6 " B N C C a b l e O s c i l l a t o r S o u r c eS h u t t e r G r o u n d W i r e E v a p o r a t i o n S u p p l y O u t p u t C o n t r o l I n p u t B N C C a b l e s This section ident...
Page 10 - : Verify that the power cable provided is connected to
Chapter 1 Quick Start 1-5 1.5 Installation W ARNING : Care should be exercised to route SQC-122c cables as far as practical from other cables that carry high voltages or generate noise. This includes other line voltagecables, wires to heaters that are SCR-controlled, and cables to source power suppl...
Page 12 - Edit Mode; Store the parameter and move to next parameter for; Press; Exit to Main; to return to the main screen.
Chapter 1 Quick Start 1-7 Edit Mode To edit a setting in any menu, turn the control knob to scroll tothe desired setting, then press the Edit SoftKey. In Edit mode, the cursor moves to the setting value and theSoftKey functions change to show: Next: Store the parameter and move to next parameter for...
Page 14 - This page left blank for your notes.
Chapter 1 Quick Start 1-9 This page left blank for your notes.
Page 15 - the thickness and rate that it be deposited in a process.; Film Menu; to display the parameters for this
Chapter 2 Operation 2-1 2.0 Introduction This chapter describes common tasks associated with operating the SQC-122c. Itassumes that you understand basic operation of the menus and parameter setup asdescribed in Chapter 1. Detailed definitions of unfamiliar setup parameters can befound under the appr...
Page 16 - Edit; to; Enter
Chapter 2 Operation 2-2 The most commonly modified parameters are shown on the first film parameters screen.Additional parameters can be accessed by pressing Film Conds (film conditioning) orDeposit Controls. I T e r m S e n s o r 1 S e n s o r 2 O u t p u t P o c k e t M a x P o w e r S l e w R a t...
Page 17 - Film Conds
Chapter 2 Operation 2-3 The PID parameters control the response of the SQC-122c to changes in depositionrate. These values are unique to each deposition chamber setup, and to a lesser extentto each material. The P Term is proportional (or gain), the % process rate change divided by the % inputpower ...
Page 18 - Prev Menu
Chapter 2 Operation 2-4 From the Film Conds menu, press Prev Menu to return to the main Film Params menu. Now press Deposit Controls . The Deposit Controls menu contains parameters that modify operation during the deposition phase. Capture Setting Error Rate Sampling Setting Accuracy Based Undefined...
Page 20 - to return to the list of layers, or; to return to the Main
Chapter 2 Operation 2-6 Initial Rate and Final Thickness are the main process setpoints for this layer of material.Keep in mind that the SQC-122c zeroes thickness at the beginning of each layer. It isnot a cumulative value. Time Setpoint and Thickness Limit are arbitrary values that will activate a ...
Page 21 - In the; System Params; menu, Max Frequency is the initial frequency of a new crystal,
Chapter 2 Operation 2-7 2.4 Sensor Setup The theory of operation for a quartz crystal sensor is quite simple. The sensor initiallyoscillates at its natural frequency, typically 6MHz. As material is deposited on thesubstrate, it is also deposited on the sensor. Depending on the density of the deposit...
Page 22 - Sensor Tooling, also found in the; menu, adjusts for the difference in
Chapter 2 Operation 2-8 Sensor Tooling, also found in the System Params menu, adjusts for the difference in measured deposition rate between the sensor and the substrate being coated. S u b s t r a t e S u b s t r a t e T o o l i n g O v e r 1 0 0 % T o o l i n g U n d e r 1 0 0 % In the illustratio...
Page 23 - Next Menu; until the Sensor Info option is shown, then press; Sensor Info
Chapter 2 Operation 2-9 Once the sensor parameters are set, test your sensor setup to assure reliable readingsat the SQC-122c. A typical single sensor setup is shown below: On the SQC-122c, press Next Menu until the Sensor Info option is shown, then press Sensor Info . Any connected sensor (whether ...
Page 24 - The SQC-122c control voltage output range is set in the; Systems Params
Chapter 2 Operation 2-10 2.5 Source Setup The SQC-122c controls deposition rate by varying the control voltage to an externalevaporation (source) supply. The previous illustration for sensor wiring also showssource supply wiring. The SQC-122c control voltage output range is set in the Systems Params...
Page 27 - Enough preliminaries, let’s start the process!; Start; Stop Layer; Nxt Layer and Restart Layer.
Chapter 2 Operation 2-13 Enough preliminaries, let’s start the process! Press Start from any of the main screen menus to start deposition. If the first layer Start mode was programmed as Manual, you will need to press the Start Layer SoftKeynow to start the layer. Note : Don’t confuse Manual and Aut...
Page 28 - Restart Layer; repeats the stopped layer, beginning with preconditioning.; Start Nxt; only restart the process at Layer 1!
Chapter 2 Operation 2-14 T H I C K N E S S ( k A ) 0 . 8 2 4 R A T E ( A / s ) 7 . 8 P O W E R ( % ) 5 5 . 3 Film : F i l m 1 L a y e r : 1 o f 4 P r o c e s s : M y P r o c e s s 1 L a y e r R a t e : 8 . 0 0 F i n a l T h i c k : 1 . 1 0 0 R u n T i m e : 0 : 0 1 : 4 5 P H A S E : S t o p L a y e ...
Page 30 - about 10% overshoot, lower the P Term. If the time to reach PWR; Set Preconditioning; : The power level you recorded as PWR
Chapter 2 Operation 2-16 about 10% overshoot, lower the P Term. If the time to reach PWR D R is very slow, increase the P Term. A lower I Term will increase response time, a higher value willeliminate ringing and setpoint deviations. It is unlikely you will need any D Term. Continue to Start the pro...
Page 37 - Next Menu Screens; Replaces the graph with the sensor information screen:
Chapter 3 Menus 3-4 3.2 Next Menu Screens The Next Menu SoftKey provides access to two sub-menus of the Main Menu thatcontrol display and operating mode preferences. Next Menu Screens Zero Zeros the thickness reading. Useful for resetting or extendingthe current deposition layer. Auto /Manual Toggle...
Page 40 - Main Screen; Returns to the Main Menu.; Delete; Deletes the highlighted process and all of its layers.; Control Knob; Scroll Processes with Knob
Chapter 3 Menus 3-7 3.4 Process Menus There are several tiers of Process Menus. The first menu (shown below) selects thecurrent process. The current process is the process that is ready to run, and also theprocess that is selected for editing. Main Screen Returns to the Main Menu. PrevMenu Steps bac...
Page 44 - Displays the Film Edit Menu for the highlighted film.
Chapter 3 Menus 3-11 3.5 Film Menus Each film has certain characteristics that determine how it should be deposited. TheFilm Menus allow you to set parameters that regulate the deposition of each film in acertain process. My Process 1 Editing: Scroll Films with Knob 11. Film 11 Film Select Menu Main...
Page 48 - A description of each film parameter follows:
Chapter 3 Menus 3-15 A description of each film parameter follows: P Term: The proportional term sets the gain of the control loop. High gains yield more responsive (but potentially unstable) loops. Try a value of 50, then graduallyincrease/decrease the value to respond to step changes in rate setpo...
Page 50 - maintain the desired accuracy during the hold phase.
Chapter 3 Menus 3-17 Feed: The feed phase holds output power at the level and time required to wire feed new material. Idle: Idle power ramps output power back to zero, or holds the material at a state that is ready for deposition (usually the same as Ramp 2 power). Shutter Delay: It is often desira...
Page 51 - E d i t S y s t e m P a r a m s M e n u
Chapter 3 Menus 3-18 3.6 System Parameters Menu The System Parameters Menu contains settings that affect the basic operation of theSQC-122c. System parameters generally pertain to the physical setup of your vacuumsystem equipment. S y s t e m T o o l i n g X t a l T o o l 2 S i m u l a t e M o d e M...
Page 55 - Relays
Chapter 3 Menus 3-22 In the I/O Setup Menu, any number of “events” can be mapped to the eight digital inputsand eight relay outputs. Options are set by selecting a relay or input and then turningthe control knob to select the desired setting. The following explains each event: Relays Explanation (cl...
Page 57 - This section covers the installation of optional accessories.; Full Rack Extender Installation; Attach the Extender
Chapter 4 Options 4-1 4.0 Introduction This section covers the installation of optional accessories. 4.1 Option Card No option cards are available for the SQC-122c, although the rear panel has locationsfor an expansion card. To expand the SQC-122c, the unit can be upgraded to anSQC-222. Contact Sigm...
Page 59 - Measurement; load; General Specifications; Mains Power Supply
Appendix B. Specifications Measurement Number of Sensors Frequency Range Frequency Accuracy Frequency Resolution Rate Accuracy Rate Resolution Thickness Accuracy Thickness Resolution Measurement Period 24.0 MHz to 6.0 MHz.01% @ 2 readings/sec..06 Hz @ 2 readings/sec.5% typical.01/.1 ? /s .5% typical...
Page 60 - Display
Appendix Display Graphs Rate, Deviation, Power Readouts Thickness, Rate, Power Process Parameters (a Process is a sequence of layers) # Processes 25 # Films 25 # Layers (total all processes) 250 Layer Parameters (Layer is a Film, plus these values) Initial Rate 0.0 to 999.9 ? /sec. Final Thickness 0...
Page 61 - Relay
Appendix C. I / O Connections A 25 pin D-sub connector, located on the rear of the SQC-122c, provides Input/Outputconnections. Refer to Section 3.6 for relay and input functional assignments. Inputs can be activated either by connecting to a switch and shorting to Ground, or theycan be driven by a T...
Page 64 - Manufacturer’s Address:
Appendix E. EC Declaration of Conformity Manufacturer’s Name: Sigma Instruments Manufacturer’s Address: 1318 Duff Drive Fort Collins, CO 80524 USA declares that the product: Product Name: Deposition Rate Controller Product Model: SQC-122c Product Options: All Options conforms to the following Direct...
