Page 2 - CONTENTS
CONTENTS 1 INTRODUCTION ........................................................................................................ 3 2 UNPACKING AND INSPECTION .............................................................................. 2 2.1 Operation Sequence .........................................
Page 3 - INTRODUCTION
1 INTRODUCTION Thank you for selecting an Iwaki America FA-2E Air Driven Bellows Pump. These pumps are designed exclusively for pumping semiconductor grade, high purity liquids. To ensure safety and maximum service life of the pump, please read this instruction manual thoroughly prior to installatio...
Page 4 - UNPACKING AND INSPECTION; been loosened in transit.
2 2 UNPACKING AND INSPECTION Open the package and check that the product conforms to your order. Also check each of the following points. For any problem or inconsistency, contact Iwaki America at once. 1. Check that the model number indicated on the nameplate conforms to the specifications of your ...
Page 5 - Sequence; Figure 2
3 2.1 Operation Sequence Refer to Figure 2. When pressurized air is supplied to chamber 'a' of the pump, bellows 'A' is compressed and fluid is discharged from the bellows through the pump head discharge (outlet) port. Simultaneously, bellows 'B' is extended and fluid is drawn into the bellows throu...
Page 6 - IDENTIFICATION CODES; : Non-metallic pump for medium temperature liquid; SPECIFICATIONS; FA-2E Pump Specifications
4 2 IDENTIFICATION CODES 1 2 3 FA - 2E - W02 1. Series code: FA : Non-metallic pump for medium temperature liquid 2. Maximum discharge volume: 0.5 Gal/min (2L/min) 3. Special specifications No symbol: Threaded suction & discharge W02 : Tubing connections 3 SPECIFICATIONS 3.1 FA-2E Pump Specifica...
Page 8 - Figure 4
6 3.3 FA-2E Pump Dimensions/Mass Mass: 8.6 lbs (3.7kg) Figure 4
Page 9 - HANDLING PRECAUTIONS; General Handling Precautions; Do not remodel the pump:
7 4 HANDLING PRECAUTIONS The following information deals with measures to ensure safe operation of the pump system. Please read the precautions carefully. To operate this pump, a 4-way solenoid valve and a controller (Iwaki America supplied model or host PLC) are required. In addition, to enhance sy...
Page 10 - Pump Handling Precautions; Never close a suction
8 4.2 Pump Handling Precautions • Do not stop pump without opening discharge first: When stopping pump operation, first release pressure in the discharge line & then shut off supply air pressure. Residual pressure in the liquid discharge piping may result in deformation of the bellows due to the...
Page 11 - System Safety Precautions
9 • Prohibited liquids: The following liquids must not be used: - Liquids that are easily crystallized - Liquids containing slurry - Solvent based fluids Service life of the valve and bellows is shortened by liquids that are easily crystallized or contain slurry. Some solvents may cause premature fa...
Page 12 - Figure 5
10 4.4 Liquid Circulation System Design Recommendations In typical semiconductor wet process liquids, a catalyst such as H 2 O, O 3 or H 2 O 2 is added to the process liquid. The subsequent reaction generates heat and produces extreme gassing of the liquid. Measures should be taken to reduce the amo...
Page 13 - Installation; the liquid supply tank as possible.
11 3. Another technique is to install an air detection sensor in the suction port area, so that the auto valve is automatically opened by a signal sent out from the sensor and the air elimination operation is initiated. 5 INSTALLATION, PIPING & WIRING 5.1 Installation 1. Pump installation positi...
Page 14 - inside surfaces prior to connecting them with the pump.; piping; diameters are as follows:; Points to be observed in suction pipe arrangement; For more detailed information, contact Iwaki America.
12 5.2 Piping 5.2.1 General 1. Carry out sufficient air blowing or flushing of tubing and connectors to remove foreign matter from inside surfaces prior to connecting them with the pump. 2. Tube connections should be done such that the extra load of piping is not applied to the pump, use pipe suppor...
Page 15 - Points to be observed in the discharge piping arrangement; pressure may deform the bellows.
13 2. Install a filter or strainer with low piping resistance on the suction piping to block the entrance of solid particles or wafer fragments. CAUTION! Wafer fragments inside the pump may get stuck in the bellows and cause damage. If solid matter clogs the pump's valves, internal suction or discha...
Page 16 - Piping
14 5.2.3 Air Piping It is critical that all pneumatic piping and components be sized according to the porting of the pump. Full port components with matching effective cross-sectional area are recommended. 1. Effective cross-sectional area indicates the capacity to allow air to flow freely. When air...
Page 19 - instructions
17 5.4 Wiring instructions 5.4.1 General A. Extension of leak detector electrode wire: Keep the resistance value at 5K ohms or below. A resistance greater than the above may make it impossible to detect a conductivity change between the leak detection electrodes. (This is dependent on the controller...
Page 21 - OPERATION; procedure; indicator LED on the controller will start flashing.; stopping; Do not close the discharge side valve to stop the pump.
19 6 OPERATION Carry out the following preparatory steps when starting pump operation for the first time after installation or after a long suspension of the pump operation. 1. Confirm that all liquid connectors along the liquid piping system are fastened tightly. 2. Confirm that the valves on the s...
Page 22 - TROUBLESHOOTING
20 7 TROUBLESHOOTING TROUBLE CAUSES COUNTERMEASURES INSPECTION & CHECK POINTS Faulty operation of 4-way solenoid valve 1 Inspect and repair or replace. a Install quick exhaust valves if damaged by corrosive gas Wrong wiring or disconnection in proximity sensor 1 Inspect and correct wiring. 2 Rep...
Page 23 - Boynton Road Hopping Brook Park Holliston, MA 01746 USA
21 TROUBLE CAUSES COUNTERMEASURES INSPECTION & CHECK POINTS Liquid leaks. Bellows are damaged. 1 Replace pump head. a Check if supply air pressure is within the specification. b Check if pump stroke speed is within the specification. c Check if liquid temperature is . within the specification. d...
