Page 2 - Sales and Service Offices
America Varian Vacuum Technologies 121 Hartwell AvenueLexington, MA 02421, USATel: (781) 861 7200Fax: (781) 860 5437Toll Free: 1 (800) 882 7426 Argentina Varian Argentina Ltd. Sucursal ArgentinaAv. Ricardo Balbin 23161428 Buenos AiresArgentinaTel: (54) 1 783 5306Fax: (54) 1 786 5172 Australia Varian...
Page 3 - Telephone Numbers; FAX Numbers; FAX
Telephone Numbers For technical support and service within the continental United States, Alaska and Hawaii: Continental U.S. only – 1-800-8-VARIAN (1-800-882-7426) Order Entry (Sales) ..............................................................................Press 1Technical Support and Field Se...
Page 4 - Warranty; Warranty Replacement and Adjustment
3/5/97 Warranty Products manufactured by Seller are warranted against defects in materials and workmanship fortwelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war-ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an...
Page 6 - ii; WARNING
ii SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THERESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGHREDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTYFROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, ANDMAINTENANCE IN...
Page 7 - iii; Hazard
iii THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONEOR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFEOPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH ORSERIOUS HARM TO PERSONNEL. Hazard Suggested Corrective Action Loss of ut...
Page 8 - iv; Prohibited Action
iv a. Explosion – Operation of the diffusion pump without prior and continuous evacuation (below 0.5 Torr (66.5 Pa)) or coolant and introducing a strong oxidizer (such as air) or explosive vapors orpowders or materials which may react with pumping fluids into a hot (above 300°F or 150°C)pump can cau...
Page 10 - – The water used to cool the pump can reach scalding temperatures.
vi d. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corro- sive gas, vapors, or chemicals, even proper operation and regeneration will not always ensure that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, orcombustible mixtur...
Page 11 - vii
vii i. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tis- sues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of lique-fied nitrogen can cause skin damage similar to high temperature burns. Contact with the cold ga...
Page 12 - Do Not Use Near A High-Temperature Source.; Ventilate
WARNING _____________ High voltages (up to 480 V) can kill. Always break the primary circuit tothe power supply before starting to work on the heater and/or its wiring. WARNING _____________ Diffusion pumps are typically cleaned with acetone, alcohol, or othersolvents. When heated, sprayed or expose...
Page 15 - List of Illustrations; Figure Title; List of Tables; Table
List of Illustrations Figure Title Page 1-1 Speed and Throughput Curves – HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1-2 Outline Drawing – HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1-3 Cooling Water Connecti...
Page 16 - SECTION I; INSTALLATION
SECTION I INSTALLATION 1-1 GENERAL Upon receipt, inspect the container for evidence of damage in shipment. Do not discard any evidence ofrough handling. Factory packing provides for maximum protection during shipment. However, the pumpshould be inspected immediately and any damage should be reported...
Page 17 - Figure 1-1. Speed and Throughput Curves – HS-20 Diffusion Pump
Installation 1-2 1-3 PHYSICAL SPECIFICATIONS (See Figure 1-2) Flange dimensions (inches): Figure 1-1. Speed and Throughput Curves – HS-20 Diffusion Pump ASA ISO 630k ISO 160k Inlet Foreline Inlet Foreline OD 27.50 9.0 27.17 7.09 ID 21.25 5.06 21.25 5.06 Thickness 1.12 0.75 0.78 0.47 Bolt Circle 25.0...
Page 18 - Installation
Installation 1-3 Figure 1-2. Outline Drawing – HS-20 Diffusion Pump, with ASA Flanges
Page 19 - CLEANING A NEW PUMP
Installation 1-4 1-4 UNPACKING Pumps are factory-packaged to permit prolonged storage in suitably protected areas without specialprecautions. WARNING _____________ When lifting some Varian diffusion pumps, use power-assisted equip-ment and trained moving/installation personnel to avoid dropping, sli...
Page 20 - For reassembly, reverse the above procedure.; Do not use near high temperature source.; CAUTION
Installation e. Remove all traces of the cleaning fluid by carefully drying with clean, dry, oil-free compressed air. f. For reassembly, reverse the above procedure. g. Clean the flanges and O-ring grooves thoroughly with acetone or alcohol, using clean, lintfree rags. 1-5 WARNING _____________ Diff...
Page 21 - The thermal switches have been designed so
Installation 1-6 WARNING Utility failure can cause damage to the equipment, overheating, andpossible explosions. Designers of the equipment using diffusion pumpsmust design their system to protect personnel and property from possi-ble hazards. 1-6 UTILITY AND SYSTEM CONNECTIONS 1-6-1 Safety Consider...
Page 22 - The quick-cool coil at the boiler plate; must; be connected to an open drain and the feed line
Installation 1-7 The cooling water discharge should, if possible, be connected to an open drain so that coolingwater flow can readily be checked. The temperature of the discharged cooling water shouldnot exceed 130°F (54°C). b. The quick-cool coil at the boiler plate must be connected to an open dra...
Page 23 - Thermal Switches
Installation 1-8 1-6-4 Electrical Connections (See Figure 1-4 and 1-5, Diffusion Pump Wiring Diagram) WARNING _____________ High voltages (up to 480V) can kill. Always break the primary circuit tothe pump before starting to work on the heater and/or its wiring. a. The pump heater has been designed t...
Page 26 - Never pressurize any part of a vacuum system for test; Always provide pressure relief when designing; ADDING PUMP FLUID
Installation 1-11 WARNING _____________ Pumps and their components are designed for vacuum service; theyare not designed to be pressurized which could cause them to burstpossibly expelling shrapnel at lethal velocities. Serious accidents havebeen caused by intentional pressurization of vacuum system...
Page 27 - NOTE
Installation a. The recommended fluid charge for the pump is five U. S. quarts. The fluid charge will graduallybe depleted through use, but the pump will continue to operate normally. When the charge isreduced to approximately 60% of the initial amount, the boiler temperature may begin to riseand un...
Page 28 - SECTION II; OPERATION
2-1 SECTION II OPERATION During initial installation, the newly installed pump fluid may be subjected to a degassing process. Thismay result in foreline pressure fluctuations and "bursts". Such fluctuations are considered normal. 2-1 START-UP PROCEDURE a. Evacuate the diffusion pump by means...
Page 29 - Operation; Switch off the power to the diffusion pump heaters.; SHUTDOWN PROCEDURE
Operation 2-2 a. Switch off the power to the diffusion pump heaters. b. Admit cooling water to the quick-cool coil if necessary and continue to circulate it until thepump body just above the boiler heat shield can be touched (approximately 130°F or 54°C).In valved systems which have tight inlet and ...
Page 30 - SECTION III; MAINTENANCE; Loss of the fluid can be caused by the following:
3-1 SECTION III MAINTENANCE 3-1 GENERAL Diffusion pumps generally require little attention when correctly operated. However, it is advisable toperform some periodic checks to insure continued trouble-free operation. By simple preventive main-tenance, costly down-time and cleaning procedures can be a...
Page 31 - Do not use near a high-temperature source.
Maintenance 3-2 c. When the pump is cold, check that the heaters are bolted snugly to the boiler plate and thatall heater terminal connections are tightly fastened inside the junction box. d. Check the total heater input and balance of load if a multi-phase heater is used. e. Check to insure that co...
Page 33 - Maintenance; Figure 3-1. External Fittings – Cold Cap Assembly
Maintenance 3-4 Figure 3-1. External Fittings – Cold Cap Assembly NOTE ________ Customer to supply water tubing to be connected to coupling with FPTthreads shown above.
Page 34 - Firmly grasp the jet cap and unscrew it from the coupling assembly.; Disassembling the Lower Jet Assembly; Remove the third stage shield.; Carefully remove the fourth stage jet from the jet base.
Maintenance 3-5 JET ASSEMBLY The HS-20 jet assembly consists of several subassemblies. The lower jet assembly consists of the jetbase and stages 3 and 4. A jet shield is provided for the third stage jet. The second stage jet issecured to the central tube and forms a subassembly. A shield is provided...
Page 36 - Carefully replace the fourth stage jet on the jet base.; Reassembling the Jet Assembly; HEATER REPLACEMENT
Maintenance 3-7 3-5-3 Reassembling the Lower Jet Assembly a Carefully replace the fourth stage jet on the jet base. b Replace the third stage jet shield. c Replace and tighten the securing screws between the third and fourth stage jets. 3-5-4 Reassembling the Jet Assembly NOTE ________ Before comple...
Page 37 - Figure 3-3 Jet Coupling
Maintenance 3-8 Figure 3-3 Jet Coupling Note: If the jet coupling loosens from the jet rod during disassembly, position it so that the top of the jet coupling is flush with the bottom of the orifice plug.
Page 39 - Remove the nuts holding the clamping plate.
Maintenance 3-10 1 Determine which heater element has failed at the junction box, then disconnect the two corre-sponding leads from the terminal strip. Pull the leads out of the terminal box then out theelbow cover plate. 2 Remove the heater cover from the bottom of the diffusion pump. Move the insu...
Page 40 - REPLACEABLE PARTS
Maintenance 3-11 3-7 REPLACEABLE PARTS The following is a list of replaceable parts for the Varian HS-20 Diffusion Pump. Part Number Description 84358301 Cold cap assembly (includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut) SST 660811494 Cold cap gasket (see Figure 3-2) F2622001 Cold cap follo...
Page 42 - SECTION IV; TROUBLESHOOTING
4-1 SECTION IV TROUBLESHOOTING 4-1 LEAKAGE Analysis of general operational experience with diffusion pumps indicates that certain locations aremore prone to the incidence of leaks. The following locations should be checked first if leakage is thesuspected cause of poor system performance. a. Inlet a...
Page 43 - Troubleshooting
Troubleshooting 4-2 Table 4-1 Troubleshooting (Cont’d) Fault Probable Cause Corrective Action Poor ultimate Contaminated pump fluid Examine and clean pump; pressure replace fluid. Low heat input Check voltage. Check for continuity, burned-out element,poor thermal contact. Inadequate cooling water fl...
