Page 2 - Interferometers; User’s Manual; Description; NOTE
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description 7O-2 User’s Manual Description NOTE In this subchapter refers to either or both of the Agilent 10737L and Agilent 10737R interferometers. The Agilent 10737L/R Compact Three-Axis interferometers (see figures 7...
Page 3 - Figure 7O-1. Agilent 10737L Compact Three-axis Interferometer
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description User’s Manual 7O-3 • The corner cube assembly. This assembly is factory-aligned to produce the required beam pattern. Do not remove the corner cube assembly or loosen the screws holding the assembly in place....
Page 4 - Figure 7O-2. Agilent 10737L Compact Three-Axis Interferometer
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description 7O-4 User’s Manual Figure 7O-2. Agilent 10737L Compact Three-Axis Interferometer AGILENT 10737L COMPACT THREE-AXIS INTERFEROMETER V iew A MEASUREMENT FACE I nput for all A xes A xis #2 A xis #3 A xis #1 S ee ...
Page 5 - Figure 7O-3. Agilent 10737R Compact Three-Axis Interferometer
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description User’s Manual 7O-5 Figure 7O-3. Agilent 10737R Compact Three-Axis Interferometer AGILENT 10737R COMPACT THREE-AXIS INTERFEROMETER V iew A INPUT FACE I nput for all A xes A xis #2 A xis #3 A xis #1 S ee V iew ...
Page 6 - Applications; General; displacement along the X-axis; T H E T A
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description 7O-6 User’s Manual Applications General The Agilent 10737L or Agilent 10737R interferometer, by making three simultaneous distance measurements along or parallel to the X-axis, can make these measurements: • ...
Page 7 - Optical Schematics
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description User’s Manual 7O-7 Figure 7O-4. Measurement using two Agilent 10737R interferometers Optical Schematics Optical schematics for these interferometers are given in Figure 7O-5. Each interferometer functions sim...
Page 9 - Special Considerations; Laser beam power consideration
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Special Considerations User’s Manual 7O-9 Special Considerations Laser beam power consideration When working with an application that requires use of a separate beam splitter, make sure that you provide enough laser beam...
Page 10 - Figure 7O-6A. Agilent 10737L Interferometer — beam patterns; AGILENT 10737L THREE-AXIS INTERFEROMETER; See Note 1; Measurement Mirror
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Special Considerations 7O-10 User’s Manual Figure 7O-6A. Agilent 10737L Interferometer — beam patterns Interferometer Input Face FROMLASERHEAD 68.92 (2.71) Bottom of interferometer as shown in specification drawing AGILE...
Page 11 - Figure 7O-6B. Agilent 10737R Interferometer—beam patterns; AGILENT 10737R THREE-AXIS INTERFEROMETER; Interferometer
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Special Considerations User’s Manual 7O-11 Figure 7O-6B. Agilent 10737R Interferometer—beam patterns AGILENT 10737R THREE-AXIS INTERFEROMETER FROM LASER HEAD Interferometer Input Face 68.92 (2.71) Bottom ofinterferometer...
Page 12 - Mounting; Adjustable mounts
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Mounting 7O-12 User’s Manual Mounting Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting, aligning, and securely locking an Agilent 10737L or Agilent 10737R interferometer in po...
Page 13 - Installation and Alignment; Summary; The installation and alignment procedure has two major parts:
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Installation and Alignment User’s Manual 7O-13 Installation and Alignment Summary The installation and alignment procedure has two major parts: • Planning and setting up the laser beam path(s) • Installing and aligning t...
Page 14 - Table 7O-1. Tools and Equipment Required or Recommended; Item and Description; True square; Adjustable; Alignment Aid
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Installation and Alignment 7O-14 User’s Manual Table 7O-1. Tools and Equipment Required or Recommended Item and Description Mfr. Part Number (Mfr = Agilent unless otherwise indicated) Comment, Note, etc. Penta prism or s...
Page 16 - Procedure; Planning the measurement setup; Which axes you want to measure, and what measurements you; Initial installation and setup
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure 7O-16 User’s Manual Procedure Planning the measurement setup Determine the general plan for your measurement. Examples of measurement setups are given throughout this manual. Particularly, your plan should addr...
Page 17 - Installing and aligning an interferometer; CAUTION; The procedure has these major parts:; Removing the receiver assembly
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure User’s Manual 7O-17 Installing and aligning an interferometer CAUTION In performing the procedure below, perform only the removal, disassembly or assembly steps described. Do not remove or take apart anything y...
Page 18 - Removing the high stability adapter (reference mirror)
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure 7O-18 User’s Manual Removing the high stability adapter (reference mirror) To remove the high stability adapter, refer to figures 7O-1 and 7O-8, and: 1 Use the 5/64-inch hex key to remove the two cap screws wit...
Page 19 - Aligning the measurement beam path; Set the laser head to the small aperture.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure User’s Manual 7O-19 Aligning the measurement beam path 1 Remove the receiver assembly and high stability adapter, as described in the respective procedures, above. 2 Install the interferometer so the beam from ...
Page 21 - Aligning the reference beam path
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure User’s Manual 7O-21 Aligning the reference beam path NOTE The measurement path must be aligned and the laser beam centered on the input aperture before aligning the reference mirror. 1 Remove the receiver assem...
Page 22 - Comparing beam path alignments; Remove the receiver assembly.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure 7O-22 User’s Manual 6 Tilt the reference mirror by adjusting the 2-56 screws until the beam from the reference mirror autoreflects back to the center of the laser small aperture. 7 Remove the alignment aid. 8 C...
Page 23 - Operation; Measurements
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Operation User’s Manual 7O-23 Operation Measurements For an interferometer setup to measure distances along the X-axis, measurements of displacement, pitch, and yaw are derived as described below. These computations are ...
Page 24 - Specifications and Characteristics
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Specifications and Characteristics 7O-24 User’s Manual Specifications and Characteristics Specifications describe the device’s warranted performance. Supplemental characteristics (indicated by TYPICAL or NOMINAL) are int...
